All Things Lithography: from Silicon Wafers to Galaxies

The price of scientific exploration is never money, but courage. "In order to break through the blockade, Chen Zhiyuan worked hard on atomic lithography technology and completed the manufacturing of advanced process chips that broke the limits of Moore's Law, new nanophotonics and plasmon devices, high-density storage and new memories, precision sensors and MEMS/NEMS devices, and basic scientific research platforms. Especially in the manufacturing of sub-1-nanometer transistors, atomic lithography machines have achieved characteristic sizes of 0.5 Nanometers and even single-atom levels, providing a new path for continuing Moore's Law.