The Space-Time Exchange: I Submit a Lithography Machine for Graduation

China has designs and people for lithography machines. However, China's materials are not good, and the processing machines are not good. The error value of the processing is too large. It is the most advanced in the world and cannot be manufactured by itself. In March 2018, the 90nm lithography machine project of Shanghai Microelectronics passed the formal acceptance. In other words, our domestic lithography machines can currently achieve 90-nanometer processes. China, photolithography machines have the following difficulties: 1. Assembly. One of the most important technologies of the lithography machine is assembly, which is to assemble all the components to achieve the highest resolution and the best overlay accuracy. "The change in the internal temperature of the machine must be controlled within five thousandths of a degree, and there must be appropriate cooling methods and accurate temperature measurement sensors." Relevant industry personnel said. SMEE's best lithography machine contains 13 subsystems, 30,000 mechanical parts, and more than 200 sensors, each of which must be stable. 2. Control. Lithography machines may be the products with the highest precision requirements in the manufacturing industry. The principle of photolithography is like engraving nanometer-sized text on an area the size of a rice grain. You can imagine the error requirements. For example, there are two synchronously moving workpiece stages in a photolithography machine, one for carrying negatives and one for carrying film. The two need to be synchronized at all times, with an error of less than 2 nanometers. The two worktables moved from static to dynamic, with an acceleration similar to that of a missile launch. Moreover, changes in temperature, humidity and air pressure will affect focus. 3. Light source. Making EUV requires extremely high energy. EUV can be absorbed by air, so the photolithography process must consume power to maintain a vacuum environment. What's even more exaggerated is that EUV can also be absorbed by lenses, so only a dozen or so lenses can be used to concentrate the light source through continuous reflection. Every time it is reflected, 30% of EUV energy is lost. After more than a dozen reflections, theoretically only 2% of the light reaches the wafer. From the perspective of continuous improvement, the Korean company Hynix once said that the energy conversion efficiency of extreme ultraviolet light EUV is only about 0.02%. Based on this calculation, the current output power of ASML's EUV lithography machine is 250 watts, so its input power will be as high as 1,250,000 watts! The light source of an EUV lithography machine will consume 30,000 kilowatt-hours of electricity when working for one day. Not to mention electricity costs, how to create a qualified light source is also a problem. ASML originally acquired Cymer, the world's leading excimer laser supplier, to produce qualified products. 4. Lens. The central lens of the lithography machine has high requirements for the lens. The lens located in the center of the lithography machine is composed of more than 20 pot-bottom-sized lenses connected in series and requires high-purity light transmission and high polishing. Currently, lenses that meet the requirements of lithography machines cannot be manufactured by machine. Advanced lithography machine lenses are all polished by hand. There are not many companies that can meet this standard (the higher the lithography machine process, the higher the requirements. Fujing Technology's products are directly related to the light source (excimer laser) and lenses. In the context of domestic substitution of lithography machines, the influence of its products is irreplaceable!

In fact, what China's industry lacks is engineering accumulation, especially engineering data and practical experience. How can you catch up with something that others have been studying for decades? It's not really an all-seeing eye. Even if it is disassembled and put in front of you, you can't copy it. For example, for my graduation project, I searched all over the CNKI and couldn't find 5 articles that could be used. What I did was simple enough. There were more than 30 named devices. I didn't dare to dig into the details of detailed pipes, flanges, channels, etc. I could list a few pages of formulas and experiences for any piece of equipment. This was all thanks to my relatively simple raw materials and products, which could be roughly calculated at a ratio of 1:1. . . 😭

True story: Chen Jian is waiting for rescue under the rubble. After seven hours of rescue, he was rescued, but he did not survive due to serious injuries. Rescued after three days of perseverance, but fell asleep forever on the stretcher ● Voice from the scene "I just want the couple to live in harmony for the rest of my life." ● Profile Chen Jian, 26 years old ● Location Beichuan, Sichuan He was pressed tightly by a large prefabricated board. He persisted for more than 70 hours, but he was conscious and could chat with the rescuers. Sichuan TV station broadcast the rescue process live. He said that he wanted to go home and live a good life with his wife. He said that he could not let the child in his wife's belly be born without a father. He said, "If you survive a catastrophe, you will be blessed later." After 6 hours, he was finally rescued. But he passed away half an hour later. While performing artificial respiration, the rescue armed policeman said: "You 'idiot', you have persisted for so long..." The female reporter cried and shook his hand: "Wake up, your wife is still waiting for you to come home!" The live broadcast host of the TV station cried so much that he could not speak, and the program was forced to interrupt...[1] His name is Chen Jian , a 26-year-old young man working in Beichuan; viewers who watched the live TV broadcast went online to pass on the news, and tears flooded the Internet... He was confident that "he will be blessed later" After 4 p. M. On May 15, in Beichuan Qiang Autonomous County, the hardest-hit area in Mianyang, Chen Jian had been supporting himself under the rubble for 73 hours. He was buried in a hill of rubble, and rescuers were trying to cut and chisel away layer by layer the prefabricated panels that were weighing him down. Within half an hour, his head came out. Although he could not move, the rescuers were very optimistic and estimated that they would be able to rescue him in another 15 minutes, because they only needed a jack to give him less than 10 centimeters of space to successfully pull him out. But soon, the rescue work ran into a new dilemma: Chen Jian's waist was pinned down by several meters of cement slabs, and his body could not be pulled out normally. Rescuers had to urgently mobilize a special rescue tool - a double-action jack, which would take at least half an hour to climb over the ruins. While waiting for the tools to arrive, Chen Jian, who was unable to move due to the weight of the prefabricated panels, chatted with reporters and rescuers with great interest, encouraging his rescuers to persevere: "I don't want my child to be born without a father." Chen Jian begged strongly. His desire to live is touching, "I haven't eaten a single grain for three days and three nights, and only drank some water. But I feel that I still have a good chance of surviving. If I survive the catastrophe, I will be blessed later." He is so strong that it is heartbreaking The reporter squatting next to the ruins kept comforting Chen Jian to hold on a little longer. , Chen Jian said: "To be honest, I almost couldn't hold on the night before. I wanted to give up my life, but I looked back and thought, I can't lose them. I really don't want to give up anyone in my family, so I have to be strong." Shouyi The fire officers and soldiers nearby responded in unison: "We will not give up on you." Chen Jian continued: "I must be strong. For everyone who loves me deeply, I must live tenaciously." Chen Jian never stopped talking. He was so strong that it was heartbreaking. He just wanted to be with his wife At 6:21 in the evening, rescuers rushed towards Chen Jian carrying tools. When the rescuers used a double-action jack to open a small gap, they found that the area below Chen Jian's waist where he was pinned down was particularly complex. There were triangle irons, steel bars, and cement blocks, and he couldn't pull it out at all. At this time, Chen Jian said that he hoped to be able to call his family: "My wife's name is Tan Xiaofeng. I don't have high hopes in this life. I just want the two of us to live in harmony for the rest of our lives." At 6:30 in the evening, the rescue work officially started. The rescuers also crawled under the rubble to set up machines. The people on the side asked Chen Jian to hum his favorite song, but he hummed the song "one, two, three" to encourage himself and the rescuers. He groaned and counted in a trembling voice: "Eight, nine, ten..." His voice was weak but full of power. At 8:15 pm, the rescuers cheered: "It's out! It's out!" At this time, Chen Jian was so weak that he could only moan. On the ruins piled with rubble, everyone carried Chen Jian and trudged forward in the dark. "Hold on, hold on!" The crowd shouted. But in the vast night, Chen Jian, whose face was covered with dust, gradually stopped responding to everyone's calls... Chen Jian, this man who warmed himself and encouraged others with love and courage, was too tired. He lay under the ruins for nearly 80 hours before rescuers finally arrived. However, shortly after people carried him out of the ruins, he lay on a stretcher and passed away forever. The above content comes from Baidu Encyclopedia

Trivia, lithography machines are not called 7-nanometer lithography machines, but 90-nanometer lithography machines... People have names, and the most advanced ones from Asmail in the Netherlands are called EUV (extreme ultraviolet) lithography machines! Its light source is 13.5 Nanometers... Not 7 nanometers! It is only capable of producing 7-nanometer chips and is called a 7-nanometer lithography machine… Now that it is used to produce 5-nanometer chips, should it be called a 5-nanometer lithography machine??? It can also be used to produce 3-nanometer chips in the future… Domestic lithography machines mainly use DUV (deep ultraviolet) lithography machines. The light source is 90 nanometers, and can be used to produce up to 28-nanometer chips. This year we plan to deliver a DUV lithography machine with a 28nm light source, which can be used to produce 7nm chips! But... There are rumors on the Internet that the acceptance failed. This is not an official statement, but the official has not come out to clarify. However, even if it is rumored that the reason for not passing the acceptance inspection is because of the low yield rate, after all, the prototype machine has been built and it is almost done! The national plan is to achieve localization of 7-nanometer chips by 2025.

I'm curious to ask what 2mn is 😅😅😅

I couldn't understand it at all at the beginning, every word was messy

Come on, author, be creative. The world will definitely be different in a thousand years. It's just photolithography machines and the like. I think they will all be eliminated in the future. They may be antiques in the future, or the time span is not that big. I am a bit more logical.

I saw the author recommending this book in another book. It's hard to start reading just because of the braille. Please give it a try and come back.

What! What! What! What is written here!

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