Lithography Machine and Love

Dear readers, I am Xu Xiaobo, the author of Lithography Machines and Love. This book was conceived based on my experience of communicating with a good friend from the Netherlands and my actual learning and practice of lithography machines. It was completed in early August 2023. After a year of reader exchange activities, it was decided to publish it. At present, international technology competition is becoming increasingly fierce, and photolithography machines are the core equipment for the development of the country's semiconductor industry. The manufacturing process of integrated circuit chips is very complex. The photolithography machine is an important part of it and is known as the mother of integrated circuits. At the same time, the photolithography machine is also widely used in the manufacturing process of various micro-electromechanical systems and is an indispensable and important equipment in the precision manufacturing industry. I would like to thank the friends who helped me with this book, and I hope that my country's integrated circuit industry will develop better and better. Author Xu Xiaobo September 7, 2024 in Zhejiang