Integrated Circuit Manufacturing Technology and Engineering Applications

Taking practical applications as the starting point, this book introduces the mainstream process technologies of integrated circuit manufacturing one by one, such as strained silicon technology, HKMG technology, SOI technology and FinFET technology. It then introduces typical processes from the perspective of process integration by comparing pictures and texts. For example, the development of isolation technology, hard mask process technology, LDD process technology, Salicide process technology, ESD IMP process technology, AL and Cu metal interconnection. Then these process technologies are applied to actual process flows, and readers can quickly grasp the practical application of specific process technologies through examples. This book aims to introduce semiconductor process technology to friends in the semiconductor industry and provide industry insiders with a reference book that is easy to understand and combined with practical applications. This book can also be used as a reading reference for students and teachers majoring in microelectronics and integrated circuits.